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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/XiaWSLMLCWJ18>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jing_Chen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Lu_Song>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Rongfeng_Luo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Shenglin_Ma>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tao_Wang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wei_Wang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xuanyanz_Li>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yanming_Xia>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yufeng_Jin>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS.2018.8557003>
foaf:homepage <https://doi.org/10.1109/NEMS.2018.8557003>
dc:identifier DBLP conf/nems/XiaWSLMLCWJ18 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS.2018.8557003 (xsd:string)
dcterms:issued 2018 (xsd:gYear)
rdfs:label A Study on High Resolution Batch-Mode Micro-Utralsonic-Machining with Constant Feed Force of Sapphire for MEMS Application. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jing_Chen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Lu_Song>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Rongfeng_Luo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Shenglin_Ma>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tao_Wang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wei_Wang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xuanyanz_Li>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yanming_Xia>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yufeng_Jin>
swrc:pages 304-307 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2018>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/XiaWSLMLCWJ18/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/XiaWSLMLCWJ18>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2018.html#XiaWSLMLCWJ18>
rdfs:seeAlso <https://doi.org/10.1109/NEMS.2018.8557003>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title A Study on High Resolution Batch-Mode Micro-Utralsonic-Machining with Constant Feed Force of Sapphire for MEMS Application. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document