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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/XueTLO21>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Gaopeng_Xue>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Masaya_Toda>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Takahito_Ono>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xinghui_Li>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS51815.2021.9451392>
foaf:homepage <https://doi.org/10.1109/NEMS51815.2021.9451392>
dc:identifier DBLP conf/nems/XueTLO21 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS51815.2021.9451392 (xsd:string)
dcterms:issued 2021 (xsd:gYear)
rdfs:label Chip-level-microassembly Comb-drive XYZ-microstage with Large Displacements and Low Crosstalk. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Gaopeng_Xue>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Masaya_Toda>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Takahito_Ono>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xinghui_Li>
swrc:pages 43-46 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2021>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/XueTLO21/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/XueTLO21>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2021.html#XueTLO21>
rdfs:seeAlso <https://doi.org/10.1109/NEMS51815.2021.9451392>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title Chip-level-microassembly Comb-drive XYZ-microstage with Large Displacements and Low Crosstalk. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document