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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/YuLY11>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Fengqi_Yu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ting_Yu_0011>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xingqiang_Lu>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS.2011.6017285>
foaf:homepage <https://doi.org/10.1109/NEMS.2011.6017285>
dc:identifier DBLP conf/nems/YuLY11 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS.2011.6017285 (xsd:string)
dcterms:issued 2011 (xsd:gYear)
rdfs:label Dual-bottom-electrode CMUT based on standard CMOS process. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Fengqi_Yu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ting_Yu_0011>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xingqiang_Lu>
swrc:pages 21-24 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2011>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/YuLY11/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/YuLY11>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2011.html#YuLY11>
rdfs:seeAlso <https://doi.org/10.1109/NEMS.2011.6017285>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title Dual-bottom-electrode CMUT based on standard CMOS process. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document