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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/YunokiKMT16>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Masaaki_Moriyama>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Michio_Kadota>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Shuji_Tanaka>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yoshimi_Yunoki>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS.2016.7758224>
foaf:homepage <https://doi.org/10.1109/NEMS.2016.7758224>
dc:identifier DBLP conf/nems/YunokiKMT16 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS.2016.7758224 (xsd:string)
dcterms:issued 2016 (xsd:gYear)
rdfs:label Plasma half dicing based on micro-loading effect for ultra-thin LiNbO3 plate wave devices on Si substrate. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Masaaki_Moriyama>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Michio_Kadota>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Shuji_Tanaka>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yoshimi_Yunoki>
swrc:pages 168-171 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2016>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/YunokiKMT16/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/YunokiKMT16>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2016.html#YunokiKMT16>
rdfs:seeAlso <https://doi.org/10.1109/NEMS.2016.7758224>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title Plasma half dicing based on micro-loading effect for ultra-thin LiNbO3 plate wave devices on Si substrate. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document