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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/ZhangBMLH23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Azrul_Azlan_Hamzah>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/John_C._LaRue>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mohd_Ambri_Mohammed>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Muhamad_Ramdzan_Buyong>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Weihong_Zhang>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS57332.2023.10190938>
foaf:homepage <https://doi.org/10.1109/NEMS57332.2023.10190938>
dc:identifier DBLP conf/nems/ZhangBMLH23 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS57332.2023.10190938 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
rdfs:label Fabrication and Characterization of Carbon Cantilevers Derived from Photoresists. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Azrul_Azlan_Hamzah>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/John_C._LaRue>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mohd_Ambri_Mohammed>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Muhamad_Ramdzan_Buyong>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Weihong_Zhang>
swrc:pages 232-236 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2023>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/ZhangBMLH23/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/ZhangBMLH23>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2023.html#ZhangBMLH23>
rdfs:seeAlso <https://doi.org/10.1109/NEMS57332.2023.10190938>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title Fabrication and Characterization of Carbon Cantilevers Derived from Photoresists. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document