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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/ZhangFCCWY23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hui_Chen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Quan_Yuan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tianren_Feng>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yangyang_Chai>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yuxin_Zhang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yuxuan_Wu>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS57332.2023.10190879>
foaf:homepage <https://doi.org/10.1109/NEMS57332.2023.10190879>
dc:identifier DBLP conf/nems/ZhangFCCWY23 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS57332.2023.10190879 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
rdfs:label Microfabricated Aluminum Nitride MEMS Resonator. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hui_Chen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Quan_Yuan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tianren_Feng>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yangyang_Chai>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yuxin_Zhang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yuxuan_Wu>
swrc:pages 213-216 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2023>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/nems/ZhangFCCWY23/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/nems/ZhangFCCWY23>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2023.html#ZhangFCCWY23>
rdfs:seeAlso <https://doi.org/10.1109/NEMS57332.2023.10190879>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title Microfabricated Aluminum Nitride MEMS Resonator. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document