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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/nems/ZhangLXFYCZG23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Haonan_Li>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Huiru_Zhang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Muyang_Zhang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Shangneng_Yu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Weijin_Guo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zejingqiu_Chen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zhiqing_Xiao>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zitao_Feng>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEMS57332.2023.10190903>
foaf:homepage <https://doi.org/10.1109/NEMS57332.2023.10190903>
dc:identifier DBLP conf/nems/ZhangLXFYCZG23 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEMS57332.2023.10190903 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
rdfs:label Fabrication of Concave Microwells and Microchannels by Off-stoichiometry Thiol-ene (OSTE) Backside Lithography. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Haonan_Li>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Huiru_Zhang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Muyang_Zhang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Shangneng_Yu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Weijin_Guo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zejingqiu_Chen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zhiqing_Xiao>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zitao_Feng>
swrc:pages 104-107 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/nems/2023>
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rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/nems/nems2023.html#ZhangLXFYCZG23>
rdfs:seeAlso <https://doi.org/10.1109/NEMS57332.2023.10190903>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/nems>
dc:title Fabrication of Concave Microwells and Microchannels by Off-stoichiometry Thiol-ene (OSTE) Backside Lithography. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document