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dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yves_Blaqui%E2%88%9A%C2%AEre>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FNEWCAS57931.2023.10198185>
foaf:homepage <https://doi.org/10.1109/NEWCAS57931.2023.10198185>
dc:identifier DBLP conf/newcas/ShuaibuBN23 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FNEWCAS57931.2023.10198185 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
rdfs:label Toward a Polysilicon-Based Electrostatically Actuated DC MEMS Switch. (xsd:string)
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swrc:pages 1-4 (xsd:string)
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dc:title Toward a Polysilicon-Based Electrostatically Actuated DC MEMS Switch. (xsd:string)
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rdf:type swrc:InProceedings
rdf:type foaf:Document