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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/ofc/HeinsaluKIMIU21>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Anna_Kawano>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hiroshi_Ishikawa>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Katsuyuki_Utaka>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Siim_Heinsalu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yuichi_Matsushima>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yuji_Isogai>
foaf:homepage <https://ieeexplore.ieee.org/document/9489640>
dc:identifier DBLP conf/ofc/HeinsaluKIMIU21 (xsd:string)
dcterms:issued 2021 (xsd:gYear)
rdfs:label Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Anna_Kawano>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hiroshi_Ishikawa>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Katsuyuki_Utaka>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Siim_Heinsalu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yuichi_Matsushima>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yuji_Isogai>
swrc:pages 1-3 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/ofc/2021>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/ofc/HeinsaluKIMIU21/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/ofc/HeinsaluKIMIU21>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/ofc/ofc2021.html#HeinsaluKIMIU21>
rdfs:seeAlso <https://ieeexplore.ieee.org/document/9489640>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/ofc>
dc:title Sensitivity improvement for silicon MS-SW BG sensors by waveguide height increase or by waveguide suspension with supporting shape modification. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document