Ultra-low loss CMOS compatible multi-layer Si3N4-on-SOI platform for 1310nm wavelength.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/ofc/HuangTLSLL15
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Ultra-low loss CMOS compatible multi-layer Si3N4-on-SOI platform for 1310nm wavelength.
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Ultra-low loss CMOS compatible multi-layer Si3N4-on-SOI platform for 1310nm wavelength.
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