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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/ofc/SaseendranKFBTK19>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Aleksandrs_Marinins>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Benedetto_Troia>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Bruno_Figeys>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Deniz_Sabuncuoglu_Tezcan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Federico_Buja>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Philippe_Soussan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Roelof_Jansen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sandeep_S._Saseendran>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sarp_Kerman>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tangla_D._Kongnyuy>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xavier_Rottenberg>
foaf:homepage <https://ieeexplore.ieee.org/document/8696834>
dc:identifier DBLP conf/ofc/SaseendranKFBTK19 (xsd:string)
dcterms:issued 2019 (xsd:gYear)
rdfs:label A 300mm CMOS-Compatible PECVD Silicon Nitride Platform for Integrated Photonics with Low Loss and Low Process Induced Phase Variation. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Aleksandrs_Marinins>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Benedetto_Troia>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Bruno_Figeys>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Deniz_Sabuncuoglu_Tezcan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Federico_Buja>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Philippe_Soussan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Roelof_Jansen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sandeep_S._Saseendran>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sarp_Kerman>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tangla_D._Kongnyuy>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xavier_Rottenberg>
swrc:pages 1-3 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/ofc/2019>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/ofc/SaseendranKFBTK19/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/ofc/SaseendranKFBTK19>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/ofc/ofc2019.html#SaseendranKFBTK19>
rdfs:seeAlso <https://ieeexplore.ieee.org/document/8696834>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/ofc>
dc:title A 300mm CMOS-Compatible PECVD Silicon Nitride Platform for Integrated Photonics with Low Loss and Low Process Induced Phase Variation. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document