A 300mm CMOS-Compatible PECVD Silicon Nitride Platform for Integrated Photonics with Low Loss and Low Process Induced Phase Variation.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/ofc/SaseendranKFBTK19
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A 300mm CMOS-Compatible PECVD Silicon Nitride Platform for Integrated Photonics with Low Loss and Low Process Induced Phase Variation.
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