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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/ofc/ZhouTCLZLYL15>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Andy_Eu-Jin_Lim>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chao_Li>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Guo-Qiang_Lo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Haifeng_Zhou>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Huijuan_Zhang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kok_Kiong_Chen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mingbin_Yu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Win_Kay_Thi>
foaf:homepage <https://ieeexplore.ieee.org/document/7121994>
dc:identifier DBLP conf/ofc/ZhouTCLZLYL15 (xsd:string)
dcterms:issued 2015 (xsd:gYear)
rdfs:label Road to commercialize ArF technology for Si photonics through wafer-level assessment. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Andy_Eu-Jin_Lim>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chao_Li>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Guo-Qiang_Lo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Haifeng_Zhou>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Huijuan_Zhang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kok_Kiong_Chen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mingbin_Yu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Win_Kay_Thi>
swrc:pages 1-3 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/ofc/2015>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/ofc/ZhouTCLZLYL15/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/ofc/ZhouTCLZLYL15>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/ofc/ofc2015.html#ZhouTCLZLYL15>
rdfs:seeAlso <https://ieeexplore.ieee.org/document/7121994>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/ofc>
dc:title Road to commercialize ArF technology for Si photonics through wafer-level assessment. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document