Effect of Post-oxidation Annealing on the Electrical Properties of Anodic Oxidized Films in Pure Water.
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2005
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Effect of Post-oxidation Annealing on the Electrical Properties of Anodic Oxidized Films in Pure Water.
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Anodic oxidation,Pure water, Fixed Charges, interface States density, Si/SiO2,Electrical characterisation, MOS Structures, Fowler-Nordheim tunnelling.
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Effect of Post-oxidation Annealing on the Electrical Properties of Anodic Oxidized Films in Pure Water.
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