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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/plans/AyaziWJLH23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chris_Heaton>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Farrokh_Ayazi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Gregory_Villiam_Junek>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Haoran_Wen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zhenming_Liu>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FPLANS53410.2023.10139948>
foaf:homepage <https://doi.org/10.1109/PLANS53410.2023.10139948>
dc:identifier DBLP conf/plans/AyaziWJLH23 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FPLANS53410.2023.10139948 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
rdfs:label Fully Integrated High-Frequency MEMS and CMOS Inertial Measurement Systems: Taking a Journey from Silicon to Silicon Carbide. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chris_Heaton>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Farrokh_Ayazi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Gregory_Villiam_Junek>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Haoran_Wen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zhenming_Liu>
swrc:pages 18-24 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/plans/2023>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/plans/AyaziWJLH23/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/plans/AyaziWJLH23>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/plans/plans2023.html#AyaziWJLH23>
rdfs:seeAlso <https://doi.org/10.1109/PLANS53410.2023.10139948>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/plans>
dc:title Fully Integrated High-Frequency MEMS and CMOS Inertial Measurement Systems: Taking a Journey from Silicon to Silicon Carbide. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document