Inverse-Designed Dual Layer c-Si/SiN Vertical Grating Couplers Tested on 300mm Wafers.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/ps/HootenJVSWSHFB22
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Inverse-Designed Dual Layer c-Si/SiN Vertical Grating Couplers Tested on 300mm Wafers.
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