Parallel DSMC Gasflow Simulation of an In-Line Coater for Reactive Sputtering.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/pvm/PflugSS06
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Parallel DSMC Gasflow Simulation of an In-Line Coater for Reactive Sputtering.
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Parallel DSMC Gasflow Simulation of an In-Line Coater for Reactive Sputtering.
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