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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/robio/DuCWCY12>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chong_Du>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mei_Yuan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Weihai_Chen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Wenjie_Chen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yunjie_Wu>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FROBIO.2012.6491099>
foaf:homepage <https://doi.org/10.1109/ROBIO.2012.6491099>
dc:identifier DBLP conf/robio/DuCWCY12 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FROBIO.2012.6491099 (xsd:string)
dcterms:issued 2012 (xsd:gYear)
rdfs:label Design of an aerostatic imprint head with off-plane alignment functionality for nanoimprint lithography. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chong_Du>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mei_Yuan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Weihai_Chen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Wenjie_Chen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yunjie_Wu>
swrc:pages 999-1004 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/robio/2012>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/robio/DuCWCY12/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/robio/DuCWCY12>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/robio/robio2012.html#DuCWCY12>
rdfs:seeAlso <https://doi.org/10.1109/ROBIO.2012.6491099>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/robio>
dc:title Design of an aerostatic imprint head with off-plane alignment functionality for nanoimprint lithography. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document