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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/saci/KelemenM21>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Andr%E2%88%9A%C2%B0s_Kelemen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/R%E2%88%9A%E2%89%A5bert_Rossi_Madar%E2%88%9A%C2%B0sz>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FSACI51354.2021.9465630>
foaf:homepage <https://doi.org/10.1109/SACI51354.2021.9465630>
dc:identifier DBLP conf/saci/KelemenM21 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FSACI51354.2021.9465630 (xsd:string)
dcterms:issued 2021 (xsd:gYear)
rdfs:label Reactive magnetron sputtering: an offline parameter identification method. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Andr%E2%88%9A%C2%B0s_Kelemen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/R%E2%88%9A%E2%89%A5bert_Rossi_Madar%E2%88%9A%C2%B0sz>
swrc:pages 357-362 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/saci/2021>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/saci/KelemenM21/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/saci/KelemenM21>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/saci/saci2021.html#KelemenM21>
rdfs:seeAlso <https://doi.org/10.1109/SACI51354.2021.9465630>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/saci>
dc:title Reactive magnetron sputtering: an offline parameter identification method. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document