High performance silicon MEMS for niche market applications. | D2R Server publishing the DBLP Bibliography Database, hosted at L3S Research Center

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dcterms:issued	2006 (xsd:gYear)
rdfs:label	High performance silicon MEMS for niche market applications. (xsd:string)
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dc:title	High performance silicon MEMS for niche market applications. (xsd:string)
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