[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/sice/UetaKSSC20>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hideyuki_Sato>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Pao-Hua_Chu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Shiori_Ueta>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Toru_Kurihara>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yuta_Saibara>
foaf:homepage <https://ieeexplore.ieee.org/document/9240449>
dc:identifier DBLP conf/sice/UetaKSSC20 (xsd:string)
dcterms:issued 2020 (xsd:gYear)
rdfs:label Detection of dislocation-free state in Dash-necking process of Si crystal growth furnace using the Czochralski Method. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hideyuki_Sato>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Pao-Hua_Chu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Shiori_Ueta>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Toru_Kurihara>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yuta_Saibara>
swrc:pages 695-700 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/sice/2020>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/sice/UetaKSSC20/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/sice/UetaKSSC20>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/sice/sice2020.html#UetaKSSC20>
rdfs:seeAlso <https://ieeexplore.ieee.org/document/9240449>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/sice>
dc:title Detection of dislocation-free state in Dash-necking process of Si crystal growth furnace using the Czochralski Method. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document