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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/sii/EtohOT24>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hiroki_Takahashi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hironori_Ogawa>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jun_Etoh>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FSII58957.2024.10417535>
foaf:homepage <https://doi.org/10.1109/SII58957.2024.10417535>
dc:identifier DBLP conf/sii/EtohOT24 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FSII58957.2024.10417535 (xsd:string)
dcterms:issued 2024 (xsd:gYear)
rdfs:label Multi-Scale Active Vibration Suppression Technology for Nanometer-Order System. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hiroki_Takahashi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hironori_Ogawa>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jun_Etoh>
swrc:pages 1543-1548 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/sii/2024>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/sii/EtohOT24/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/sii/EtohOT24>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/sii/sii2024.html#EtohOT24>
rdfs:seeAlso <https://doi.org/10.1109/SII58957.2024.10417535>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/sii>
dc:title Multi-Scale Active Vibration Suppression Technology for Nanometer-Order System. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document