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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/sma/Udeshi05>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tushar_Udeshi>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1145%2F1060244.1060273>
foaf:homepage <https://doi.org/10.1145/1060244.1060273>
dc:identifier DBLP conf/sma/Udeshi05 (xsd:string)
dc:identifier DOI doi.org%2F10.1145%2F1060244.1060273 (xsd:string)
dcterms:issued 2005 (xsd:gYear)
rdfs:label Accurate and robust geometric modeling for simulation of IC and MEMS fabrication processes. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tushar_Udeshi>
swrc:pages 257-266 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/sma/2005>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/sma/Udeshi05/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/sma/Udeshi05>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/sma/spm2005.html#Udeshi05>
rdfs:seeAlso <https://doi.org/10.1145/1060244.1060273>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/sma>
dc:subject IC and MEMS process simulation, distance transform, voxel algorithms (xsd:string)
dc:title Accurate and robust geometric modeling for simulation of IC and MEMS fabrication processes. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document