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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/smacd/HaldSHSL17>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Axel_Hald>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/J%E2%88%9A%C4%BErgen_Scheible>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jens_Lienig>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Johannes_Seelhorst>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Pekka_Herzogenrath>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FSMACD.2017.7981568>
foaf:homepage <https://doi.org/10.1109/SMACD.2017.7981568>
dc:identifier DBLP conf/smacd/HaldSHSL17 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FSMACD.2017.7981568 (xsd:string)
dcterms:issued 2017 (xsd:gYear)
rdfs:label A new method for the analysis of movement dependent parasitics in full custom designed MEMS sensors. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Axel_Hald>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/J%E2%88%9A%C4%BErgen_Scheible>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jens_Lienig>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Johannes_Seelhorst>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Pekka_Herzogenrath>
swrc:pages 1-4 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/smacd/2017>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/smacd/HaldSHSL17/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/smacd/HaldSHSL17>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/smacd/smacd2017.html#HaldSHSL17>
rdfs:seeAlso <https://doi.org/10.1109/SMACD.2017.7981568>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/smacd>
dc:title A new method for the analysis of movement dependent parasitics in full custom designed MEMS sensors. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document