Robust Control of a Two-Degree-of-Freedom Flexure-Based Nanopositioner for Planar Scanning Tasks.
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Robust Control of a Two-Degree-of-Freedom Flexure-Based Nanopositioner for Planar Scanning Tasks.
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Robust Control of a Two-Degree-of-Freedom Flexure-Based Nanopositioner for Planar Scanning Tasks.
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