A high-fidelity, web-based simulator for 300 mm wafer fabs.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/smc/KimPSWRZBM01
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dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/conf/smc/KimPSWRZBM01
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Chen_Zhou_0006
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Douglas_A._Bodner
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Hansoo_Kim_0001
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Jonghun_Park
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Leon_F._McGinnis
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Spyros_A._Reveliotis
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/SugJe_Sohn
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Ying_Wang_0013
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1109%2FICSMC.2001.973098
>
foaf:
homepage
<
https://doi.org/10.1109/ICSMC.2001.973098
>
dc:
identifier
DBLP conf/smc/KimPSWRZBM01
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1109%2FICSMC.2001.973098
(xsd:string)
dcterms:
issued
2001
(xsd:gYear)
rdfs:
label
A high-fidelity, web-based simulator for 300 mm wafer fabs.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Chen_Zhou_0006
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Douglas_A._Bodner
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Hansoo_Kim_0001
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Jonghun_Park
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Leon_F._McGinnis
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Spyros_A._Reveliotis
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/SugJe_Sohn
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Ying_Wang_0013
>
swrc:
pages
1288-1293
(xsd:string)
dcterms:
partOf
<
https://dblp.l3s.de/d2r/resource/publications/conf/smc/2001
>
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/conf/smc/KimPSWRZBM01/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/conf/smc/KimPSWRZBM01
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/conf/smc/smc2001.html#KimPSWRZBM01
>
rdfs:
seeAlso
<
https://doi.org/10.1109/ICSMC.2001.973098
>
swrc:
series
<
https://dblp.l3s.de/d2r/resource/conferences/smc
>
dc:
title
A high-fidelity, web-based simulator for 300 mm wafer fabs.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:InProceedings
rdf:
type
foaf:Document