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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/smc/LeeH03a>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jin-Shyan_Lee>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Pau-Lo_Hsu>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FICSMC.2003.1245760>
foaf:homepage <https://doi.org/10.1109/ICSMC.2003.1245760>
dc:identifier DBLP conf/smc/LeeH03a (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FICSMC.2003.1245760 (xsd:string)
dcterms:issued 2003 (xsd:gYear)
rdfs:label An IDEF0/Petri net approach to the system integration in semiconductor manufacturing systems. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jin-Shyan_Lee>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Pau-Lo_Hsu>
swrc:pages 4910-4915 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/smc/2003>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/smc/LeeH03a/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/smc/LeeH03a>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/smc/smc2003.html#LeeH03a>
rdfs:seeAlso <https://doi.org/10.1109/ICSMC.2003.1245760>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/smc>
dc:title An IDEF0/Petri net approach to the system integration in semiconductor manufacturing systems. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document