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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/socpar/PrakashM11>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/PKS_Prakash>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Se%E2%88%9A%C2%B0n_F._McLoone>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FSoCPaR.2011.6089153>
foaf:homepage <https://doi.org/10.1109/SoCPaR.2011.6089153>
dc:identifier DBLP conf/socpar/PrakashM11 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FSoCPaR.2011.6089153 (xsd:string)
dcterms:issued 2011 (xsd:gYear)
rdfs:label Plasma etch process virtual metrology using aggregative linear regression. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/PKS_Prakash>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Se%E2%88%9A%C2%B0n_F._McLoone>
swrc:pages 538-543 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/socpar/2011>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/socpar/PrakashM11/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/socpar/PrakashM11>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/socpar/socpar2011.html#PrakashM11>
rdfs:seeAlso <https://doi.org/10.1109/SoCPaR.2011.6089153>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/socpar>
dc:title Plasma etch process virtual metrology using aggregative linear regression. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document