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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/vlsi/YiLY03>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Cheon-Hee_Yi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jae-Young_Yi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yong-Hui_Lee>
dc:identifier DBLP conf/vlsi/YiLY03 (xsd:string)
dcterms:issued 2003 (xsd:gYear)
rdfs:label PEDE (Plasma Edge Damage Effect) Curing by Various Heat Treatment. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Cheon-Hee_Yi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jae-Young_Yi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yong-Hui_Lee>
swrc:pages 356-360 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/vlsi/2003>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/vlsi/YiLY03/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/vlsi/YiLY03>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/vlsi/vlsi2003.html#YiLY03>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/vlsi>
dc:title PEDE (Plasma Edge Damage Effect) Curing by Various Heat Treatment. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document