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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/vlsid/SinghalKSS02>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/C._B._Keshav>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/K._G._Surnanth>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/P._R._Suresh>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Vipul_Singhal>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FASPDAC.2002.994938>
foaf:homepage <https://doi.org/10.1109/ASPDAC.2002.994938>
dc:identifier DBLP conf/vlsid/SinghalKSS02 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FASPDAC.2002.994938 (xsd:string)
dcterms:issued 2002 (xsd:gYear)
rdfs:label Transistor Flaring in Deep Submicron-Design Considerations. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/C._B._Keshav>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/K._G._Surnanth>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/P._R._Suresh>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Vipul_Singhal>
swrc:pages 299-304 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/vlsid/2002>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/vlsid/SinghalKSS02/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/vlsid/SinghalKSS02>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/vlsid/vlsid2002.html#SinghalKSS02>
rdfs:seeAlso <https://doi.org/10.1109/ASPDAC.2002.994938>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/vlsid>
dc:subject Design for Manufacturability (DFM), Deep Submicron (DSM), pullback, photolithography, Subwavelength-lithography, Optical Proximity Correction (OPC), SPICE-models, standard-ce1l library. (xsd:string)
dc:title Transistor Flaring in Deep Submicron-Design Considerations. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document