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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/vlsit/ElsayedGSSKMCJH23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/A._Elsayed>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Andriy_Hikavyy>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Bogdan_Govoreanu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Clement_Godfrin>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/D._Wan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/George_Simion>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Iuliana_P._Radu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Julien_Jussot>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kristiaan_De_Greve>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/M._M._K._Shehata>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Massimo_Mongillo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Nard_I._Dumoulin_Stuyck>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/P._Van_Dorpe>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/R._Li>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Roger_Loo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/S._Massar>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Stefan_Kubicek>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yann_Canvel>
foaf:homepage <http://dx.doi.org/doi.org%2F10.23919%2FVLSITechnologyandCir57934.2023.10185272>
foaf:homepage <https://doi.org/10.23919/VLSITechnologyandCir57934.2023.10185272>
dc:identifier DBLP conf/vlsit/ElsayedGSSKMCJH23 (xsd:string)
dc:identifier DOI doi.org%2F10.23919%2FVLSITechnologyandCir57934.2023.10185272 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
rdfs:label Comprehensive 300 mm process for Silicon spin qubits with modular integration. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/A._Elsayed>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Andriy_Hikavyy>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Bogdan_Govoreanu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Clement_Godfrin>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/D._Wan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/George_Simion>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Iuliana_P._Radu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Julien_Jussot>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kristiaan_De_Greve>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/M._M._K._Shehata>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Massimo_Mongillo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Nard_I._Dumoulin_Stuyck>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/P._Van_Dorpe>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/R._Li>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Roger_Loo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/S._Massar>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Stefan_Kubicek>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yann_Canvel>
swrc:pages 1-2 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/vlsit/2023>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/vlsit/ElsayedGSSKMCJH23/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/vlsit/ElsayedGSSKMCJH23>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/vlsit/vlsit2023.html#ElsayedGSSKMCJH23>
rdfs:seeAlso <https://doi.org/10.23919/VLSITechnologyandCir57934.2023.10185272>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/vlsit>
dc:title Comprehensive 300 mm process for Silicon spin qubits with modular integration. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document