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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/vlsit/JeongLMMLKMCSKC23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Byungha_Choi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chang-Woo_Sohn>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Gitae_Jeong>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hyungjong_Lee>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ja-Hum_Ku>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jaehun_Jeong>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jeongmin_Choi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jungmin_Park>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sada-Aki_Masuoka>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sanghoon_Lee>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sanghyeon_Lee>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Seokhoon_Kim>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Seungkwon_Kim>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Shincheol_Min>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sung_Won_Kim>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Taehun_Myung>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Taeyoung_Kim>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yuri_Yasuda-Masuoka>
foaf:homepage <http://dx.doi.org/doi.org%2F10.23919%2FVLSITechnologyandCir57934.2023.10185353>
foaf:homepage <https://doi.org/10.23919/VLSITechnologyandCir57934.2023.10185353>
dc:identifier DBLP conf/vlsit/JeongLMMLKMCSKC23 (xsd:string)
dc:identifier DOI doi.org%2F10.23919%2FVLSITechnologyandCir57934.2023.10185353 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
rdfs:label World's First GAA 3nm Foundry platform Technology (SF3) with Novel Multi-Bridge-Channel-FET (MBCFET‚ĄĘ) Process. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Byungha_Choi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chang-Woo_Sohn>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Gitae_Jeong>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hyungjong_Lee>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ja-Hum_Ku>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jaehun_Jeong>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jeongmin_Choi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jungmin_Park>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sada-Aki_Masuoka>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sanghoon_Lee>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sanghyeon_Lee>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Seokhoon_Kim>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Seungkwon_Kim>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Shincheol_Min>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sung_Won_Kim>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Taehun_Myung>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Taeyoung_Kim>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yuri_Yasuda-Masuoka>
swrc:pages 1-2 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/vlsit/2023>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/vlsit/JeongLMMLKMCSKC23/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/vlsit/JeongLMMLKMCSKC23>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/vlsit/vlsit2023.html#JeongLMMLKMCSKC23>
rdfs:seeAlso <https://doi.org/10.23919/VLSITechnologyandCir57934.2023.10185353>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/vlsit>
dc:title World's First GAA 3nm Foundry platform Technology (SF3) with Novel Multi-Bridge-Channel-FET (MBCFET‚ĄĘ) Process. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document