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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/vlsit/NogamiGSNPHSLPS22>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Akira_Uedono>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Andrew_Simon>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Brown_Peethala>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Daniel_Edelstein>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Devika_Sil>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Fabien_Roz%E2%88%9A%C2%A9>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Fulvio_Mazzamuto>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hosadurga_Shobha>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Huai_Huang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Junjun_Liu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Nelson_Felix>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Nick_Lanzillo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Oleg_Gluschenkov>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Raghuveer_Patlolla>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sebastien_Halty>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Son_Nguyen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Takeshi_Nogami>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Toshiyuki_Tabata>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yasir_Sulehria>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yasutoshi_Okuno>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FVLSITechnologyandCir46769.2022.9830488>
foaf:homepage <https://doi.org/10.1109/VLSITechnologyandCir46769.2022.9830488>
dc:identifier DBLP conf/vlsit/NogamiGSNPHSLPS22 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FVLSITechnologyandCir46769.2022.9830488 (xsd:string)
dcterms:issued 2022 (xsd:gYear)
rdfs:label Advanced BEOL Materials, Processes, and Integration to Reduce Line Resistance of Damascene Cu, Co, and Subtractive Ru Interconnects. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Akira_Uedono>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Andrew_Simon>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Brown_Peethala>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Daniel_Edelstein>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Devika_Sil>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Fabien_Roz%E2%88%9A%C2%A9>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Fulvio_Mazzamuto>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hosadurga_Shobha>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Huai_Huang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Junjun_Liu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Nelson_Felix>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Nick_Lanzillo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Oleg_Gluschenkov>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Raghuveer_Patlolla>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sebastien_Halty>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Son_Nguyen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Takeshi_Nogami>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Toshiyuki_Tabata>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yasir_Sulehria>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yasutoshi_Okuno>
swrc:pages 423-424 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/vlsit/2022>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/vlsit/NogamiGSNPHSLPS22/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/vlsit/NogamiGSNPHSLPS22>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/vlsit/vlsit2022.html#NogamiGSNPHSLPS22>
rdfs:seeAlso <https://doi.org/10.1109/VLSITechnologyandCir46769.2022.9830488>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/vlsit>
dc:title Advanced BEOL Materials, Processes, and Integration to Reduce Line Resistance of Damascene Cu, Co, and Subtractive Ru Interconnects. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document