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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/vlsit/TharejaPWDYSZCH23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Alexander_Jansen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Andy_Lo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ashish_Pal>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ben_Ng>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Brian_Brown>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Buvna_Ayyagari-Sangamalli>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Carmen_L._Cervantes>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/El_Mehdi_Bazizi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Feng_Chen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Gaurav_Thareja>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/He_Ren>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jianshe_Tang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Keyvan_Kashefizadeh>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Liton_Dey>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Matthew_Spuller>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Max_Gage>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mehul_Naik>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Norman_Tam>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Pradeep_S._Kumar>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Qing_Zhu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sameer_Deshpande>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sefa_Dag>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Shashank_Sharma>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Shi_You>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Shinjae_Hwang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sidney_Huey>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sree_Kesapragada>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Vinod_Reddy>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xianjin_Xie>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xianmin_Tang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xingye_Wang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zhebo_Chen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zhiyuan_Wu>
foaf:homepage <http://dx.doi.org/doi.org%2F10.23919%2FVLSITechnologyandCir57934.2023.10185299>
foaf:homepage <https://doi.org/10.23919/VLSITechnologyandCir57934.2023.10185299>
dc:identifier DBLP conf/vlsit/TharejaPWDYSZCH23 (xsd:string)
dc:identifier DOI doi.org%2F10.23919%2FVLSITechnologyandCir57934.2023.10185299 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
rdfs:label BEOL Interconnect Innovation: Materials, Process and Systems Co-optimization for 3nm Node and Beyond. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Alexander_Jansen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Andy_Lo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ashish_Pal>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ben_Ng>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Brian_Brown>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Buvna_Ayyagari-Sangamalli>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Carmen_L._Cervantes>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/El_Mehdi_Bazizi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Feng_Chen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Gaurav_Thareja>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/He_Ren>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jianshe_Tang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Keyvan_Kashefizadeh>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Liton_Dey>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Matthew_Spuller>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Max_Gage>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mehul_Naik>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Norman_Tam>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Pradeep_S._Kumar>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Qing_Zhu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sameer_Deshpande>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sefa_Dag>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Shashank_Sharma>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Shi_You>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Shinjae_Hwang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sidney_Huey>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sree_Kesapragada>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Vinod_Reddy>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xianjin_Xie>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xianmin_Tang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xingye_Wang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zhebo_Chen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zhiyuan_Wu>
swrc:pages 1-2 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/vlsit/2023>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/vlsit/TharejaPWDYSZCH23/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/vlsit/TharejaPWDYSZCH23>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/vlsit/vlsit2023.html#TharejaPWDYSZCH23>
rdfs:seeAlso <https://doi.org/10.23919/VLSITechnologyandCir57934.2023.10185299>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/vlsit>
dc:title BEOL Interconnect Innovation: Materials, Process and Systems Co-optimization for 3nm Node and Beyond. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document