[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/vlsit/WangZKJHSZLKLZG23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chen_Sun_0010>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Dong_Zhang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Gan_Liu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kaizhen_Han>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Leming_Jiao>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Long_Liu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Qiwen_Kong>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xiao_Gong>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Xiaolin_Wang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Yuye_Kang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zijie_Zheng>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Zuopu_Zhou>
foaf:homepage <http://dx.doi.org/doi.org%2F10.23919%2FVLSITechnologyandCir57934.2023.10185306>
foaf:homepage <https://doi.org/10.23919/VLSITechnologyandCir57934.2023.10185306>
dc:identifier DBLP conf/vlsit/WangZKJHSZLKLZG23 (xsd:string)
dc:identifier DOI doi.org%2F10.23919%2FVLSITechnologyandCir57934.2023.10185306 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
rdfs:label First Demonstration of BEOL-Compatible MFMIS Fe-FETs with 3D Multi-Fin Floating Gate: In-situ ALD-deposited MFM, LCH of 50 nm, > 2√ó109 Endurance, and 58.3% Area Saving. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chen_Sun_0010>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Dong_Zhang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Gan_Liu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kaizhen_Han>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Leming_Jiao>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Long_Liu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Qiwen_Kong>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xiao_Gong>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Xiaolin_Wang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Yuye_Kang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zijie_Zheng>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Zuopu_Zhou>
swrc:pages 1-2 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/vlsit/2023>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/vlsit/WangZKJHSZLKLZG23/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/vlsit/WangZKJHSZLKLZG23>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/vlsit/vlsit2023.html#WangZKJHSZLKLZG23>
rdfs:seeAlso <https://doi.org/10.23919/VLSITechnologyandCir57934.2023.10185306>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/vlsit>
dc:title First Demonstration of BEOL-Compatible MFMIS Fe-FETs with 3D Multi-Fin Floating Gate: In-situ ALD-deposited MFM, LCH of 50 nm, > 2√ó109 Endurance, and 58.3% Area Saving. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document