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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/wacv/HiroiSW02>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chie_Shishido>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Masahiro_Watanabe>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Takashi_Hiroi>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FACV.2002.1182191>
foaf:homepage <https://doi.org/10.1109/ACV.2002.1182191>
dc:identifier DBLP conf/wacv/HiroiSW02 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FACV.2002.1182191 (xsd:string)
dcterms:issued 2002 (xsd:gYear)
rdfs:label Pattern Alignment Method Based on Consistency Among Local Registration Candidates for LSI Wafer Pattern Inspection. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chie_Shishido>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Masahiro_Watanabe>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Takashi_Hiroi>
swrc:pages 257-263 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/wacv/2002>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/wacv/HiroiSW02/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/wacv/HiroiSW02>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/wacv/wacv2002.html#HiroiSW02>
rdfs:seeAlso <https://doi.org/10.1109/ACV.2002.1182191>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/wacv>
dc:title Pattern Alignment Method Based on Consistency Among Local Registration Candidates for LSI Wafer Pattern Inspection. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document