Criticality Measures for Time Constraint Tunnels in Semiconductor Manufacturing.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/wsc/AnthouardBDCR22
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dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/conf/wsc/AnthouardBDCR22
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Benjamin_Anthouard
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Quentin_Christ
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Renaud_Roussel
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/St%E2%88%9A%C2%A9phane_Dauz%E2%88%9A%C2%AEre-P%E2%88%9A%C2%A9r%E2%88%9A%C2%AEs
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Valeria_Borodin
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1109%2FWSC57314.2022.10015381
>
foaf:
homepage
<
https://doi.org/10.1109/WSC57314.2022.10015381
>
dc:
identifier
DBLP conf/wsc/AnthouardBDCR22
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1109%2FWSC57314.2022.10015381
(xsd:string)
dcterms:
issued
2022
(xsd:gYear)
rdfs:
label
Criticality Measures for Time Constraint Tunnels in Semiconductor Manufacturing.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Benjamin_Anthouard
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Quentin_Christ
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Renaud_Roussel
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/St%E2%88%9A%C2%A9phane_Dauz%E2%88%9A%C2%AEre-P%E2%88%9A%C2%A9r%E2%88%9A%C2%AEs
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Valeria_Borodin
>
swrc:
pages
3326-3337
(xsd:string)
dcterms:
partOf
<
https://dblp.l3s.de/d2r/resource/publications/conf/wsc/2022
>
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/conf/wsc/AnthouardBDCR22/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/conf/wsc/AnthouardBDCR22
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/conf/wsc/wsc2022.html#AnthouardBDCR22
>
rdfs:
seeAlso
<
https://doi.org/10.1109/WSC57314.2022.10015381
>
swrc:
series
<
https://dblp.l3s.de/d2r/resource/conferences/wsc
>
dc:
title
Criticality Measures for Time Constraint Tunnels in Semiconductor Manufacturing.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:InProceedings
rdf:
type
foaf:Document