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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/wsc/ArishaY04>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Amr_Arisha>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Paul_Young>
foaf:homepage <http://www.informs-sim.org/wsc04papers/258.pdf>
dc:identifier DBLP conf/wsc/ArishaY04 (xsd:string)
dcterms:issued 2004 (xsd:gYear)
rdfs:label Intelligent Simulation-Based Lot Scheduling of Photolithography Toolsets in a Wafer Fabrication Facility. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Amr_Arisha>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Paul_Young>
swrc:pages 1935-1942 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/wsc/2004>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/wsc/ArishaY04/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/wsc/ArishaY04>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/wsc/wsc2004.html#ArishaY04>
rdfs:seeAlso <http://www.informs-sim.org/wsc04papers/258.pdf>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/wsc>
dc:title Intelligent Simulation-Based Lot Scheduling of Photolithography Toolsets in a Wafer Fabrication Facility. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document