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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/wsc/BaumG92>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Peter_G._Glassey>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Susan_S._Baum>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1145%2F167293.167760>
foaf:homepage <https://doi.org/10.1145/167293.167760>
dc:identifier DBLP conf/wsc/BaumG92 (xsd:string)
dc:identifier DOI doi.org%2F10.1145%2F167293.167760 (xsd:string)
dcterms:issued 1992 (xsd:gYear)
rdfs:label Supporting Semiconductor Manufacturing Simulation Tools Using a Structured Data Model. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Peter_G._Glassey>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Susan_S._Baum>
swrc:pages 879-884 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/wsc/1992>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/wsc/BaumG92/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/wsc/BaumG92>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/wsc/wsc1992.html#BaumG92>
rdfs:seeAlso <https://doi.org/10.1145/167293.167760>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/wsc>
dc:title Supporting Semiconductor Manufacturing Simulation Tools Using a Structured Data Model. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document