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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/wsc/DeenenAF22>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/John_W._Fowler>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Patrick_C._Deenen>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Rick_A._M._Adriaensen>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FWSC57314.2022.10015307>
foaf:homepage <https://doi.org/10.1109/WSC57314.2022.10015307>
dc:identifier DBLP conf/wsc/DeenenAF22 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FWSC57314.2022.10015307 (xsd:string)
dcterms:issued 2022 (xsd:gYear)
rdfs:label Building a Digital Twin of the Photolithography Area of A Real-World Wafer FAB To Validate Improved Production Control. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/John_W._Fowler>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Patrick_C._Deenen>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Rick_A._M._Adriaensen>
swrc:pages 3394-3405 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/wsc/2022>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/wsc/DeenenAF22/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/wsc/DeenenAF22>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/wsc/wsc2022.html#DeenenAF22>
rdfs:seeAlso <https://doi.org/10.1109/WSC57314.2022.10015307>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/wsc>
dc:title Building a Digital Twin of the Photolithography Area of A Real-World Wafer FAB To Validate Improved Production Control. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document