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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/wsc/GanLQHCK06>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Bart_van_der_Heijden>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Boon-Ping_Gan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chen_Chong_Chin>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Choon_Yap_Koh>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kelvin_Paht_Te_Quek>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Peter_Lendermann>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FWSC.2006.322961>
foaf:homepage <https://doi.org/10.1109/WSC.2006.322961>
dc:identifier DBLP conf/wsc/GanLQHCK06 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FWSC.2006.322961 (xsd:string)
dcterms:issued 2006 (xsd:gYear)
rdfs:label Simulation analysis on the impact of furnace batch size increase in a deposition loop. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Bart_van_der_Heijden>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Boon-Ping_Gan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chen_Chong_Chin>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Choon_Yap_Koh>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kelvin_Paht_Te_Quek>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Peter_Lendermann>
swrc:pages 1821-1828 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/wsc/2006>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/wsc/GanLQHCK06/dblp>
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rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/wsc/wsc2006.html#GanLQHCK06>
rdfs:seeAlso <https://doi.org/10.1109/WSC.2006.322961>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/wsc>
dc:title Simulation analysis on the impact of furnace batch size increase in a deposition loop. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document