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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/wsc/GuptaLSP08>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Amit_Kumar_Gupta>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Appa_Iyer_Sivakumar>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/John_Priyadi>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Peter_Lendermann>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FWSC.2008.4736312>
foaf:homepage <https://doi.org/10.1109/WSC.2008.4736312>
dc:identifier DBLP conf/wsc/GuptaLSP08 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FWSC.2008.4736312 (xsd:string)
dcterms:issued 2008 (xsd:gYear)
rdfs:label Simulation analysis of cluster tool operations in wafer fabrication. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Amit_Kumar_Gupta>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Appa_Iyer_Sivakumar>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/John_Priyadi>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Peter_Lendermann>
swrc:pages 2141-2147 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/wsc/2008>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/wsc/GuptaLSP08/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/wsc/GuptaLSP08>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/wsc/wsc2008.html#GuptaLSP08>
rdfs:seeAlso <https://doi.org/10.1109/WSC.2008.4736312>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/wsc>
dc:title Simulation analysis of cluster tool operations in wafer fabrication. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document