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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/wsc/HoodAV89>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Amy_E._B._Amamoto>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Antonie_T._Vandenberge>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Sarah_J._Hood>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1145%2F76738.76840>
foaf:homepage <https://doi.org/10.1145/76738.76840>
dc:identifier DBLP conf/wsc/HoodAV89 (xsd:string)
dc:identifier DOI doi.org%2F10.1145%2F76738.76840 (xsd:string)
dcterms:issued 1989 (xsd:gYear)
rdfs:label A modular structure for a highly detailed model of semiconductor manufacturing. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Amy_E._B._Amamoto>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Antonie_T._Vandenberge>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Sarah_J._Hood>
swrc:pages 811-817 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/wsc/1989>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/wsc/HoodAV89/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/wsc/HoodAV89>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/wsc/wsc1989.html#HoodAV89>
rdfs:seeAlso <https://doi.org/10.1145/76738.76840>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/wsc>
dc:title A modular structure for a highly detailed model of semiconductor manufacturing. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document