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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/wsc/Morrison11>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/James_R._Morrison>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FWSC.2011.6147916>
foaf:homepage <https://doi.org/10.1109/WSC.2011.6147916>
dc:identifier DBLP conf/wsc/Morrison11 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FWSC.2011.6147916 (xsd:string)
dcterms:issued 2011 (xsd:gYear)
rdfs:label On the fidelity of the ax+b equipment model for clustered photolithography scanners in fab-level simulation. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/James_R._Morrison>
swrc:pages 2034-2044 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/wsc/2011>
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rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/wsc/wsc2011.html#Morrison11>
rdfs:seeAlso <https://doi.org/10.1109/WSC.2011.6147916>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/wsc>
dc:title On the fidelity of the ax+b equipment model for clustered photolithography scanners in fab-level simulation. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document