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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/wsc/NazzalM01>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Dima_Nazzal>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Mansooreh_Mollaghasemi>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FWSC.2001.977433>
foaf:homepage <https://doi.org/10.1109/WSC.2001.977433>
dc:identifier DBLP conf/wsc/NazzalM01 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FWSC.2001.977433 (xsd:string)
dcterms:issued 2001 (xsd:gYear)
rdfs:label Critical tools identification and characteristics curves construction in a wafer fabrication facility. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Dima_Nazzal>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Mansooreh_Mollaghasemi>
swrc:pages 1194-1199 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/wsc/2001>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/wsc/NazzalM01/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/wsc/NazzalM01>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/wsc/wsc2001.html#NazzalM01>
rdfs:seeAlso <https://doi.org/10.1109/WSC.2001.977433>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/wsc>
dc:title Critical tools identification and characteristics curves construction in a wafer fabrication facility. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document