[RDF data]
Home | Example Publications
PropertyValue
dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/wsc/StanleySM02>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Jos%E2%88%9A%C2%A9_Maia>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/K._J._Stanley>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Timothy_D._Stanley>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FWSC.2002.1166404>
foaf:homepage <https://doi.org/10.1109/WSC.2002.1166404>
dc:identifier DBLP conf/wsc/StanleySM02 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FWSC.2002.1166404 (xsd:string)
dcterms:issued 2002 (xsd:gYear)
rdfs:label Wafer fabrication: realizing 300mm fab productivity improvements through integrated metrology. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Jos%E2%88%9A%C2%A9_Maia>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/K._J._Stanley>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Timothy_D._Stanley>
swrc:pages 1369-1376 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/wsc/2002>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/wsc/StanleySM02/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/wsc/StanleySM02>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/wsc/wsc2002.html#StanleySM02>
rdfs:seeAlso <https://doi.org/10.1109/WSC.2002.1166404>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/wsc>
dc:title Wafer fabrication: realizing 300mm fab productivity improvements through integrated metrology. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document