Wafer fabrication: effects of metrology load port buffering in automated 300mm factories.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/conf/wsc/WrightSRS02
Home
|
Example Publications
Property
Value
dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/conf/wsc/WrightSRS02
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Kristin_Rust
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Marlin_Shopbell
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Robert_Wright_II
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Silpa_Sigireddy
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1109%2FWSC.2002.1166402
>
foaf:
homepage
<
https://doi.org/10.1109/WSC.2002.1166402
>
dc:
identifier
DBLP conf/wsc/WrightSRS02
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1109%2FWSC.2002.1166402
(xsd:string)
dcterms:
issued
2002
(xsd:gYear)
rdfs:
label
Wafer fabrication: effects of metrology load port buffering in automated 300mm factories.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Kristin_Rust
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Marlin_Shopbell
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Robert_Wright_II
>
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Silpa_Sigireddy
>
swrc:
pages
1359-1364
(xsd:string)
dcterms:
partOf
<
https://dblp.l3s.de/d2r/resource/publications/conf/wsc/2002
>
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/conf/wsc/WrightSRS02/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/conf/wsc/WrightSRS02
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/conf/wsc/wsc2002.html#WrightSRS02
>
rdfs:
seeAlso
<
https://doi.org/10.1109/WSC.2002.1166402
>
swrc:
series
<
https://dblp.l3s.de/d2r/resource/conferences/wsc
>
dc:
title
Wafer fabrication: effects of metrology load port buffering in automated 300mm factories.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:InProceedings
rdf:
type
foaf:Document