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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/conf/wsc/ZhangKHR23>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Cathal_Heavey>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kamil_Erkan_Kabak>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Oliver_Rose>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tao_Zhang_0044>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FWSC60868.2023.10408616>
foaf:homepage <https://doi.org/10.1109/WSC60868.2023.10408616>
dc:identifier DBLP conf/wsc/ZhangKHR23 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FWSC60868.2023.10408616 (xsd:string)
dcterms:issued 2023 (xsd:gYear)
rdfs:label A Reinforcement Learning Approach for Improved Photolithography Schedules. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Cathal_Heavey>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kamil_Erkan_Kabak>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Oliver_Rose>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tao_Zhang_0044>
swrc:pages 2136-2147 (xsd:string)
dcterms:partOf <https://dblp.l3s.de/d2r/resource/publications/conf/wsc/2023>
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/conf/wsc/ZhangKHR23/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/conf/wsc/ZhangKHR23>
rdfs:seeAlso <http://dblp.uni-trier.de/db/conf/wsc/wsc2023.html#ZhangKHR23>
rdfs:seeAlso <https://doi.org/10.1109/WSC60868.2023.10408616>
swrc:series <https://dblp.l3s.de/d2r/resource/conferences/wsc>
dc:title A Reinforcement Learning Approach for Improved Photolithography Schedules. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:InProceedings
rdf:type foaf:Document