Internal transport in automated semiconductor manufacturing systems.
Resource URI: https://dblp.l3s.de/d2r/resource/publications/journals/4or/Torres07
Home
|
Example Publications
Property
Value
dcterms:
bibliographicCitation
<
http://dblp.uni-trier.de/rec/bibtex/journals/4or/Torres07
>
dc:
creator
<
https://dblp.l3s.de/d2r/resource/authors/Jairo_Rafael_Montoya-Torres
>
foaf:
homepage
<
http://dx.doi.org/doi.org%2F10.1007%2Fs10288-006-0005-5
>
foaf:
homepage
<
https://doi.org/10.1007/s10288-006-0005-5
>
dc:
identifier
DBLP journals/4or/Torres07
(xsd:string)
dc:
identifier
DOI doi.org%2F10.1007%2Fs10288-006-0005-5
(xsd:string)
dcterms:
issued
2007
(xsd:gYear)
swrc:
journal
<
https://dblp.l3s.de/d2r/resource/journals/4or
>
rdfs:
label
Internal transport in automated semiconductor manufacturing systems.
(xsd:string)
foaf:
maker
<
https://dblp.l3s.de/d2r/resource/authors/Jairo_Rafael_Montoya-Torres
>
swrc:
number
1
(xsd:string)
swrc:
pages
93-97
(xsd:string)
owl:
sameAs
<
http://bibsonomy.org/uri/bibtexkey/journals/4or/Torres07/dblp
>
owl:
sameAs
<
http://dblp.rkbexplorer.com/id/journals/4or/Torres07
>
rdfs:
seeAlso
<
http://dblp.uni-trier.de/db/journals/4or/4or5.html#Torres07
>
rdfs:
seeAlso
<
https://doi.org/10.1007/s10288-006-0005-5
>
dc:
subject
MSC Classification 90C10; 90C59; 90B06; 90B80
(xsd:string)
dc:
title
Internal transport in automated semiconductor manufacturing systems.
(xsd:string)
dc:
type
<
http://purl.org/dc/dcmitype/Text
>
rdf:
type
swrc:Article
rdf:
type
foaf:Document
swrc:
volume
5
(xsd:string)