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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/access/LieHWCK17>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chao-Yi_Huang>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Chun-Sheng_Wu>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Frederick_Lie>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Hung-Fei_Kuo>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Kao-Tun_Chen>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FACCESS.2017.2694854>
foaf:homepage <https://doi.org/10.1109/ACCESS.2017.2694854>
dc:identifier DBLP journals/access/LieHWCK17 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FACCESS.2017.2694854 (xsd:string)
dcterms:issued 2017 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/access>
rdfs:label Demonstration of ACO-Based Freeform Source for ArF Laser Immersion Lithography System. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chao-Yi_Huang>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Chun-Sheng_Wu>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Frederick_Lie>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Hung-Fei_Kuo>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Kao-Tun_Chen>
swrc:pages 6421-6428 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/access/LieHWCK17/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/access/LieHWCK17>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/access/access5.html#LieHWCK17>
rdfs:seeAlso <https://doi.org/10.1109/ACCESS.2017.2694854>
dc:title Demonstration of ACO-Based Freeform Source for ArF Laser Immersion Lithography System. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 5 (xsd:string)