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dcterms:bibliographicCitation <http://dblp.uni-trier.de/rec/bibtex/journals/access/TinTL22>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Ching_Kwang_Lee>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Saw_Chin_Tan>
dc:creator <https://dblp.l3s.de/d2r/resource/authors/Tze_Chiang_Tin>
foaf:homepage <http://dx.doi.org/doi.org%2F10.1109%2FACCESS.2022.3193783>
foaf:homepage <https://doi.org/10.1109/ACCESS.2022.3193783>
dc:identifier DBLP journals/access/TinTL22 (xsd:string)
dc:identifier DOI doi.org%2F10.1109%2FACCESS.2022.3193783 (xsd:string)
dcterms:issued 2022 (xsd:gYear)
swrc:journal <https://dblp.l3s.de/d2r/resource/journals/access>
rdfs:label Virtual Metrology in Semiconductor Fabrication Foundry Using Deep Learning Neural Networks. (xsd:string)
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Ching_Kwang_Lee>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Saw_Chin_Tan>
foaf:maker <https://dblp.l3s.de/d2r/resource/authors/Tze_Chiang_Tin>
swrc:pages 81960-81973 (xsd:string)
owl:sameAs <http://bibsonomy.org/uri/bibtexkey/journals/access/TinTL22/dblp>
owl:sameAs <http://dblp.rkbexplorer.com/id/journals/access/TinTL22>
rdfs:seeAlso <http://dblp.uni-trier.de/db/journals/access/access10.html#TinTL22>
rdfs:seeAlso <https://doi.org/10.1109/ACCESS.2022.3193783>
dc:title Virtual Metrology in Semiconductor Fabrication Foundry Using Deep Learning Neural Networks. (xsd:string)
dc:type <http://purl.org/dc/dcmitype/Text>
rdf:type swrc:Article
rdf:type foaf:Document
swrc:volume 10 (xsd:string)